@article{202308.0655,
	doi = {10.20944/preprints202308.0655.v2},
	url = {https://doi.org/10.20944/preprints202308.0655.v2},
	year = 2023,
	month = {August},
	publisher = {Preprints},
	author = {Jinlong Ge and Lingli Liu and Xiaoqi Jin and Liyuan Zhang and Yuhong Jiao and Qiuqin Wang and Yongkui Wang},
	title = {Facile Synthesis Monodisperse SiO<sub>2</sub> Sphere And Their Application Performances in Chemical Mechanical Polishing},
	journal = {Preprints}
}