TY  - GENERIC
DO  - 10.20944/preprints202107.0162.v1
UR  - http://dx.doi.org/10.20944/preprints202107.0162.v1
TI  - Influence of N<sub>2</sub> Flows on Sputtered Ta(N) films: Electrical, Structural, Chemical and Optical Properties
T2  - Preprints
AU  - Hu, Yingying
AU  - Rasadujjaman, Md
AU  - Wang, Yanrong
AU  - Zhang, Jing
AU  - Yan, Jiang
AU  - Baklanov, Mikhail R.
PY  - 2021
DA  - 2021/07/06
PB  - Preprints