@article{202107.0162,
	doi = {10.20944/preprints202107.0162.v1},
	url = {https://doi.org/10.20944/preprints202107.0162.v1},
	year = 2021,
	month = {July},
	publisher = {Preprints},
	author = {Yingying Hu and Md Rasadujjaman and Yanrong Wang and Jing Zhang and Jiang Yan and Mikhail R. Baklanov},
	title = {Influence of N<sub>2</sub> Flows on Sputtered Ta(N) films: Electrical, Structural, Chemical and Optical Properties},
	journal = {Preprints}
}