TY  - GENERIC
DO  - 10.20944/preprints201807.0160.v1
UR  - http://dx.doi.org/10.20944/preprints201807.0160.v1
TI  - Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering
T2  - Preprints
AU  - Razmi, Abbas
AU  - Yeşildal, Ruhi
PY  - 2018
DA  - 2018/07/10
PB  - Preprints