@article{201807.0160,
	doi = {10.20944/preprints201807.0160.v1},
	url = {https://doi.org/10.20944/preprints201807.0160.v1},
	year = 2018,
	month = {July},
	publisher = {Preprints},
	author = {Abbas Razmi and Ruhi Yeşildal},
	title = {Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering},
	journal = {Preprints}
}