TY  - GENERIC
DO  - 10.20944/preprints201806.0167.v1
UR  - http://dx.doi.org/10.20944/preprints201806.0167.v1
TI  - Surface Removal of Copper Thin Film under the Ultrathin Water Environment for Nanoscale Process
T2  - Preprints
AU  - Shi, Junqin
AU  - Peng, Weixiang
AU  - Chen, Juan
AU  - Fang, Liang
AU  - Sun, Kun
PY  - 2018
DA  - 2018/06/12
PB  - Preprints