@article{201806.0167,
	doi = {10.20944/preprints201806.0167.v1},
	url = {https://doi.org/10.20944/preprints201806.0167.v1},
	year = 2018,
	month = {June},
	publisher = {Preprints},
	author = {Junqin Shi and Weixiang Peng and Juan Chen and Liang Fang and Kun Sun},
	title = {Surface Removal of Copper Thin Film under the Ultrathin Water Environment for Nanoscale Process},
	journal = {Preprints}
}