TY  - GENERIC
DO  - 10.20944/preprints202311.1412.v1
UR  - http://dx.doi.org/10.20944/preprints202311.1412.v1
TI  - Features of Plasma-Chemical Hydrogen Reduction of Volatile Silicon and Germanium Chlorides in rf-arc Discharge
T2  - Preprints
AU  - Kornev, Roman
AU  - Gornushkin, Igor
AU  - Shabarova, Lubov
AU  - Ermakov, Artur
AU  - Mochalov, Georgiy
AU  - Rekunov, Nikita
AU  - Medov, Vitaly
AU  - Chaschina, Alena
AU  - Kalinina, Alexandra
PY  - 2023
DA  - 2023/11/22
PB  - Preprints