@article{202311.1412,
	doi = {10.20944/preprints202311.1412.v1},
	url = {https://doi.org/10.20944/preprints202311.1412.v1},
	year = 2023,
	month = {November},
	publisher = {Preprints},
	author = {Roman Kornev and Igor Gornushkin and Lubov Shabarova and Artur Ermakov and Georgiy Mochalov and Nikita Rekunov and Vitaly Medov and Alena Chaschina and Alexandra Kalinina},
	title = {Features of Plasma-Chemical Hydrogen Reduction of Volatile Silicon and Germanium Chlorides in rf-arc Discharge},
	journal = {Preprints}
}