TY  - GENERIC
DO  - 10.20944/preprints202308.0057.v1
UR  - http://dx.doi.org/10.20944/preprints202308.0057.v1
TI  - Titanium Oxynitride Thin Films by Reactive Sputtering with an Independent Pulsing of O2 and N2 Gases
T2  - Preprints
AU  - Martin, Nicolas
AU  - Cote, Jean-Marc
AU  - Gavoille, Joseph
AU  - Rauch, Jean-Yves
PY  - 2023
DA  - 2023/08/01
PB  - Preprints