@article{202308.0057,
	doi = {10.20944/preprints202308.0057.v1},
	url = {https://doi.org/10.20944/preprints202308.0057.v1},
	year = 2023,
	month = {August},
	publisher = {Preprints},
	author = {Nicolas Martin and Jean-Marc Cote and Joseph Gavoille and Jean-Yves Rauch},
	title = {Titanium Oxynitride Thin Films by Reactive Sputtering with an Independent Pulsing of O2 and N2 Gases},
	journal = {Preprints}
}