TY - GENERIC DO - 10.20944/preprints202203.0199.v1 UR - http://dx.doi.org/10.20944/preprints202203.0199.v1 TI - Adaptive Sliding Mode Disturbance Observer and Deep Reinforcement Learning based Robust Motion Control for Micropositioners T2 - Preprints AU - Liang, Shiyun AU - Xi, Ruidong AU - Xiao, Xiao AU - Yang, Zhixin PY - 2022 DA - 2022/03/15 PB - Preprints