@article{202203.0199, doi = {10.20944/preprints202203.0199.v1}, url = {https://doi.org/10.20944/preprints202203.0199.v1}, year = 2022, month = {March}, publisher = {Preprints}, author = {Shiyun Liang and Ruidong Xi and Xiao Xiao and Zhixin Yang}, title = {Adaptive Sliding Mode Disturbance Observer and Deep Reinforcement Learning based Robust Motion Control for Micropositioners}, journal = {Preprints} }