TY  - GENERIC
DO  - 10.20944/preprints201705.0171.v1
UR  - http://dx.doi.org/10.20944/preprints201705.0171.v1
TI  - A Novel Integrated High Precision Vacuum Microelectronic Accelerometer
T2  - Preprints
AU  - Liu, Haitao
AU  - Wen, Zhiyu
AU  - Huang, Wengang
AU  - Li, Donglin
AU  - Chen, Li
AU  - Yuan, XiaoHan
PY  - 2017
DA  - 2017/05/23
PB  - Preprints