@article{201705.0171,
	doi = {10.20944/preprints201705.0171.v1},
	url = {https://doi.org/10.20944/preprints201705.0171.v1},
	year = 2017,
	month = {May},
	publisher = {Preprints},
	author = {Haitao Liu and Zhiyu Wen and Wengang Huang and Donglin Li and Li Chen and XiaoHan Yuan},
	title = {A Novel Integrated High Precision Vacuum Microelectronic Accelerometer},
	journal = {Preprints}
}