TY  - GENERIC
DO  - 10.20944/preprints202202.0299.v1
UR  - http://dx.doi.org/10.20944/preprints202202.0299.v1
TI  - Plasma Chemical Production Technology of AlN as High Thermal Conductivity Material
T2  - Preprints
AU  - Aleksandrov, Daniil
AU  - Kim, Artem
AU  - Novikov, Pavel
AU  - Popovich, Anatoly
PY  - 2022
DA  - 2022/02/23
PB  - Preprints