@article{202202.0299,
	doi = {10.20944/preprints202202.0299.v1},
	url = {https://doi.org/10.20944/preprints202202.0299.v1},
	year = 2022,
	month = {February},
	publisher = {Preprints},
	author = {Daniil Aleksandrov and Artem Kim and Pavel Novikov and Anatoly Popovich},
	title = {Plasma Chemical Production Technology of AlN as High Thermal Conductivity Material},
	journal = {Preprints}
}