TY - GENERIC DO - 10.20944/preprints202307.0738.v1 UR - http://dx.doi.org/10.20944/preprints202307.0738.v1 TI - The Effect of Heavy Doping Layer on Charge Collection Efficiency in P-type Silicon Substrate of EBCMOS Devices T2 - Preprints AU - Qin, XuLei AU - Shi, QiDong AU - Li, Ye AU - Song, De AU - Shi, Feng PY - 2023 DA - 2023/07/11 PB - Preprints