@article{202307.0738,
	doi = {10.20944/preprints202307.0738.v1},
	url = {https://doi.org/10.20944/preprints202307.0738.v1},
	year = 2023,
	month = {July},
	publisher = {Preprints},
	author = {XuLei Qin and QiDong Shi and Ye Li and De Song and Feng Shi},
	title = {The Effect of Heavy Doping Layer on Charge Collection Efficiency in P-type Silicon Substrate of EBCMOS Devices},
	journal = {Preprints}
}