Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

On the Static Pull-in of Tilting Actuation in Hybrid Levitation Micro-actuator: Theory and Experiment

Version 1 : Received: 29 July 2021 / Approved: 30 July 2021 / Online: 30 July 2021 (09:14:36 CEST)

How to cite: Poletkin, K.V. On the Static Pull-in of Tilting Actuation in Hybrid Levitation Micro-actuator: Theory and Experiment. Preprints 2021, 2021070683 (doi: 10.20944/preprints202107.0683.v1). Poletkin, K.V. On the Static Pull-in of Tilting Actuation in Hybrid Levitation Micro-actuator: Theory and Experiment. Preprints 2021, 2021070683 (doi: 10.20944/preprints202107.0683.v1).

Abstract

This work presents the results of the experimental and theoretical study of the static pull-in of tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on the combination of inductive levitation and electrostatic actuation. A semi-analytical model to study such the pull-in phenomenon is developed, for the first time, as a result of using the qualitative technique based on the Lagrangian approach to analyze inductive contactless suspensions presented in work and a recent progress in the calculation of mutual inductance and force between two circular filaments. The obtained non-linear model, accounting for two degrees of freedom of the actuator, allows us to predict accurately the static pull-in displacement and voltage. The results of modelling were verified experimentally and agree well with measurements.

Keywords

micro-actuators; micro-systems; micro-manipulators; levitation; mutual inductance

Comments (0)

We encourage comments and feedback from a broad range of readers. See criteria for comments and our diversity statement.

Leave a public comment
Send a private comment to the author(s)
Views 0
Downloads 0
Comments 0
Metrics 0


×
Alerts
Notify me about updates to this article or when a peer-reviewed version is published.
We use cookies on our website to ensure you get the best experience.
Read more about our cookies here.