A Novel Type Room Temperature Surface Photovoltage Gas Sensor Device

In this paper a novel type of a highly sensitive gas sensor device based on the surface photovoltage effect is described. The developed surface photovoltage gas sensor is based on a reverse Kelvin probe approach. As the active gas sensing electrode the porous ZnO nanostructured thin films are used deposited by the direct current (DC) reactive magnetron sputtering method exhibiting the nanocoral surface morphology combined with an evident surface nonstoichiometry related to the unintentional surface carbon and water vapor contaminations. Among others, the demonstrated SPV gas sensor device exhibits a high sensitivity of 1 ppm to NO₂ with a signal to noise ratio of about 50 and a fast response time of several seconds under the room temperature conditions.