ARTICLE
|
doi:10.20944/preprints201805.0454.v2
Subject:
Engineering,
Electrical And Electronic Engineering
Keywords:
CMOS-NEMS; NEMS; NEM memory switch; encapsulation; M3D
Online: 29 June 2018 (16:36:01 CEST)
ARTICLE
|
doi:10.20944/preprints202309.1995.v1
Subject:
Physical Sciences,
Condensed Matter Physics
Keywords:
Casimir effect; Actuation dynamics; MEMS; NEMS; Stiction
Online: 28 September 2023 (11:48:45 CEST)
ARTICLE
|
doi:10.20944/preprints202312.1968.v1
Subject:
Physical Sciences,
Applied Physics
Keywords:
micro/nanoelectromechanical system (MEMS/NEMS); membrane; crystalline anisotropy; single-crystal material; silicon-on-insulator (SOI); deformation
Online: 26 December 2023 (10:09:08 CET)