Kornev, R.; Gornushkin, I.; Shabarova, L.; Kadomtseva, A.; Mochalov, G.; Rekunov, N.; Romanov, S.; Medov, V.; Belousova, D.; Maleev, N. Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction. Sci2024, 6, 1.
Kornev, R.; Gornushkin, I.; Shabarova, L.; Kadomtseva, A.; Mochalov, G.; Rekunov, N.; Romanov, S.; Medov, V.; Belousova, D.; Maleev, N. Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction. Sci 2024, 6, 1.
Kornev, R.; Gornushkin, I.; Shabarova, L.; Kadomtseva, A.; Mochalov, G.; Rekunov, N.; Romanov, S.; Medov, V.; Belousova, D.; Maleev, N. Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction. Sci2024, 6, 1.
Kornev, R.; Gornushkin, I.; Shabarova, L.; Kadomtseva, A.; Mochalov, G.; Rekunov, N.; Romanov, S.; Medov, V.; Belousova, D.; Maleev, N. Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction. Sci 2024, 6, 1.
Abstract
The processes of hydrogen reduction of silicon and germanium chlorides under the conditions of high-frequency (40.68 MHz) counteracted arc discharge stabilized between two rod electrodes are investigated. The main gas-phase and solid products of plasma-chemical transformations are determined. Thermodynamic analysis of SiCl4 + H2 and GeCl4 + H2 systems for optimal process parameters was carried out. Using the example of hydrogen reduction of SiCl4 by the method of numerical modeling, gas-dynamic and thermal processes for this type of discharge are investigated. The impurity composition of gas-phase and solid reaction products is investigated. The possibility of single-stage production of high-purity Si and Ge mainly in the form of compact ingots, as well as high-purity chlorosilanes and trichlorogermane, is shown.
Chemistry and Materials Science, Chemical Engineering
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