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Electron-Beam Processing of Aluminum-Containing Ceramics in the Forevacuum Pressure Range
Version 1
: Received: 30 August 2023 / Approved: 30 August 2023 / Online: 31 August 2023 (09:45:01 CEST)
A peer-reviewed article of this Preprint also exists.
Klimov, A.; Bakeev, I.; Zenin, A. Electron-Beam Processing of Aluminum-Containing Ceramics in the Forevacuum Pressure Range. Ceramics 2023, 6, 2098-2116. Klimov, A.; Bakeev, I.; Zenin, A. Electron-Beam Processing of Aluminum-Containing Ceramics in the Forevacuum Pressure Range. Ceramics 2023, 6, 2098-2116.
Abstract
We have investigated the effect of electron-beam irradiation by a forevacuum-pressure plasma-cathode electron source on the surface roughness and hardness of Al2O3- and AlN-based ceramics. The roughness increases with increasing temperature of the processed surface, while the hardness slightly decreases. For aluminum nitride ceramic, we find that the thermal conductivity increases by a factor of 1.5 to 2 depending on the electron-beam irradiation regime.
Keywords
plasma-cathode electron source; electron-beam irradiation; roughness; microhardness; thermal conductivity; ceramics; processing; Al2O3; AlN
Subject
Physical Sciences, Applied Physics
Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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